发明授权
US08366967B2 Metal chalcogenide aqueous precursors and processes to form metal chalcogenide films
有权
金属硫族化物含水前体和形成金属硫族化物膜的方法
- 专利标题: Metal chalcogenide aqueous precursors and processes to form metal chalcogenide films
- 专利标题(中): 金属硫族化物含水前体和形成金属硫族化物膜的方法
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申请号: US12709834申请日: 2010-02-22
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公开(公告)号: US08366967B2公开(公告)日: 2013-02-05
- 发明人: Douglas A. Keszler , Bejamin L. Clark
- 申请人: Douglas A. Keszler , Bejamin L. Clark
- 申请人地址: US OR Corvallis
- 专利权人: Inpria Corporation
- 当前专利权人: Inpria Corporation
- 当前专利权人地址: US OR Corvallis
- 代理机构: Dardi & Herbert PLLC
- 代理商 Peter S. Dardi; Mengmeng Fahrni
- 主分类号: H01B1/00
- IPC分类号: H01B1/00
摘要:
Metal chalcogenide precursor solutions are described that comprise an aqueous solvent, dissolved metal formate salts and a chalcogenide source composition. The chalcogenide source compositions can be organic compounds lacking a carbon-carbon bond. The precursors are designed to form a desired metal chalcogenide upon thermal processing into films with very low levels of contamination. Potentially contaminating elements in the precursors form gaseous or vapor by-products that escape from the vicinity of the product metal chalcogenide films.
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