A chip with tri-layer electrodes and micro-cavity arrays for control of bioparticles and a manufacturing method thereof are revealed. The chip captures and releases bioparticles into and from preset cavities by dielectrophoresis (DEP) force generated by electrodes. The chip includes an upper layer body, a middle layer body, a lower layer body, respectively disposed with an electrode, and micro flow chambers. The electrodes of the upper layer body and the middle layer body are common electrodes while the electrode of the lower layer body is a dispersive electrode array exposed on the bottom of lower-layer microcavity. The cell capture and release at the single-cell level and the cell population level are attained by application of an AC electric field.