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US08367191B2 Optical thin-films and optical elements comprising same 失效
光学薄膜和包含该薄膜的光学元件

Optical thin-films and optical elements comprising same
Abstract:
Optical thin-films are disclosed that are formed from optical thin films formed on a base plate arranged in a vacuum chamber. The base plates are held on a plurality of retaining frames of a base-plate retainer. The thin films are formed by heating the base plate and emitting a deposition material from a deposition source. The retaining frames are configured to make the entire base plate uniformly heated.
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