发明授权
- 专利标题： Reflecting film excellent in cohesion resistance and sulfur resistance
- 专利标题（中）： 反射膜具有优异的内聚力和耐硫性
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申请号： US11962942申请日： 2007-12-21
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公开(公告)号： US08367200B2公开(公告)日： 2013-02-05
- 发明人: Toshiki Sato , Jun Suzuki , Shinichi Tanifuji , Takayuki Tsubota , Yoshinori Ito
- 申请人： Toshiki Sato , Jun Suzuki , Shinichi Tanifuji , Takayuki Tsubota , Yoshinori Ito
- 申请人地址： JP Kobe-shi
- 专利权人： Kobe Steel, Ltd.
- 当前专利权人： Kobe Steel, Ltd.
- 当前专利权人地址： JP Kobe-shi
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权： JP2007-003710 20070111
- 主分类号： B32B15/00
- IPC分类号： B32B15/00
摘要：
A reflecting film including: an Ag or Ag-base alloy thin film of an Ag-base alloy containing at least one element among Au, Pt, Pd, Bi, and rare-earth elements as a first layer; a film of an oxide or oxynitride of at least one element among Si, Al and Ti having a thickness between 5 and 50 nm as a second layer deposited on the first layer; and a film having a thickness between 10 and 100 nm formed by a plasma polymerization process as a third layer deposited on the second layer.