Invention Grant
US08367429B2 Adaptive endpoint method for pad life effect on chemical mechanical polishing
有权
化学机械抛光的垫寿命效应的自适应终点法
- Patent Title: Adaptive endpoint method for pad life effect on chemical mechanical polishing
- Patent Title (中): 化学机械抛光的垫寿命效应的自适应终点法
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Application No.: US13045289Application Date: 2011-03-10
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Publication No.: US08367429B2Publication Date: 2013-02-05
- Inventor: Chu-An Lee , Hui-Chi Huang , Peng-Chung Jangjian
- Applicant: Chu-An Lee , Hui-Chi Huang , Peng-Chung Jangjian
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/306

Abstract:
The present disclosure provides a semiconductor manufacturing method. The method includes defining a plurality of time regions of pad life for a polishing pad in a chemical mechanical polishing (CMP) system; assigning a ladder coefficient to the polishing pad according to the plurality of time regions of pad life; defining a plurality of endpoint windows to the plurality of time regions, respectively, according to pad life effect; applying a CMP process to a wafer positioned on the polishing pad; determining a time region of a polishing signal of the wafer based on the ladder coefficient; associating one of the endpoint windows to the polishing signal according to the time region; and ending the CMP process at an endpoint determined by the endpoint window.
Public/Granted literature
- US20120231555A1 ADAPTIVE ENDPOINT METHOD FOR PAD LIFE EFFECT ON CHEMICAL MECHANICAL POLISHING Public/Granted day:2012-09-13
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