发明授权
- 专利标题: Multiple Orientation Nanowires with Gate Stack Sensors
- 专利标题(中): 具有栅极堆叠传感器的多方向纳米线
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申请号: US13593686申请日: 2012-08-24
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公开(公告)号: US08367492B2公开(公告)日: 2013-02-05
- 发明人: Dureseti Chidambarrao , Xiao Hu Liu , Lidija Sekaric
- 申请人: Dureseti Chidambarrao , Xiao Hu Liu , Lidija Sekaric
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Harrington & Smith
- 代理商 Louis J. Percello
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/8234
摘要:
An electronic device includes a conductive channel defining a crystal structure and having a length and a thickness tC; and a dielectric film of thickness tg in contact with a surface of the channel. Further, the film comprises a material that exerts one of a compressive or a tensile force on the contacted surface of the channel such that electrical mobility of the charge carriers (electrons or holes) along the channel length is increased due to the compressive or tensile force in dependence on alignment of the channel length relative to the crystal structure. Embodiments are given for chips with both hole and electron mobility increased in different transistors, and a method for making such a transistor or chip.
公开/授权文献
- US20120322215A1 COMMUNICATION 公开/授权日:2012-12-20
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