- 专利标题: Low fabrication cost, fine pitch and high reliability solder bump
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申请号: US10935451申请日: 2004-09-07
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公开(公告)号: US08368213B2公开(公告)日: 2013-02-05
- 发明人: Jin-Yuan Lee , Mou-Shiung Lin , Ching-Cheng Huang
- 申请人: Jin-Yuan Lee , Mou-Shiung Lin , Ching-Cheng Huang
- 申请人地址: TW Hsinchu
- 专利权人: Megica Corporation
- 当前专利权人: Megica Corporation
- 当前专利权人地址: TW Hsinchu
- 代理机构: McDermott Will & Emery LLP
- 主分类号: H01L23/485
- IPC分类号: H01L23/485
摘要:
A barrier layer is deposited over a layer of passivation including in an opening to a contact pad created in the layer of passivation. A column of three layers of metal is formed overlying the barrier layer and aligned with the contact pad and having a diameter that is about equal to the surface of the contact pad. The three metal layers of the column comprise, in succession when proceeding from the layer that is in contact with the barrier layer, a layer of pillar metal, a layer of under bump metal and a layer of solder metal. The layer of pillar metal is reduced in diameter, the barrier layer is selectively removed from the surface of the layer of passivation after which reflowing of the solder metal completes the solder bump of the invention.
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