Invention Grant
US08371155B2 Scanning probe microscopy employing correlation pattern recognition 失效
扫描探针显微镜采用相关模式识别

Scanning probe microscopy employing correlation pattern recognition
Abstract:
An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest.
Information query
Patent Agency Ranking
0/0