Invention Grant
- Patent Title: Scanning probe microscopy employing correlation pattern recognition
- Patent Title (中): 扫描探针显微镜采用相关模式识别
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Application No.: US12854112Application Date: 2010-08-10
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Publication No.: US08371155B2Publication Date: 2013-02-12
- Inventor: Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Kah Choong Loo , Cing Siong Ling
- Applicant: Lin Zhou , Huiwen Liu , Dale Egbert , Peter Gunderson , John Ibele , Cing Siong Ling
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Agency: McCarthy Law Group
- Agent Mitchell K. McCarthy
- Main IPC: G01N19/02
- IPC: G01N19/02

Abstract:
An apparatus and associated method for topographically characterizing a workpiece. A scanning probe obtains topographical data from the workpiece. A processor controls the scanning probe to scan a reference surface of the workpiece to derive a first digital file and to scan a surface of interest that includes at least a portion of the reference surface to derive a second digital file. Correlation pattern recognition logic integrates the first and second digital files together to align the reference surface with the surface of interest.
Public/Granted literature
- US20110138505A1 SCANNING PROBE MICROSCOPY EMPLOYING CORRELATION PATTERN RECOGNITION Public/Granted day:2011-06-09
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