Invention Grant
- Patent Title: Rotary switching valve
- Patent Title (中): 旋转切换阀
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Application No.: US12712609Application Date: 2010-02-25
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Publication No.: US08371334B2Publication Date: 2013-02-12
- Inventor: Yukio Ozawa , Takashi Yajima , Tsuneyuki Okabe , Shigeyuki Okura
- Applicant: Yukio Ozawa , Takashi Yajima , Tsuneyuki Okabe , Shigeyuki Okura
- Applicant Address: JP Komaki JP Tokyo
- Assignee: CKD Corporation,Tokyo Electron Limited
- Current Assignee: CKD Corporation,Tokyo Electron Limited
- Current Assignee Address: JP Komaki JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2009-063062 20090316
- Main IPC: F16K11/085
- IPC: F16K11/085

Abstract:
A rotary valve (1) includes a valve body (2) formed with a chamber communication passage (24) for flowing a main fluid and a vent communication passage (25) for discharging the main fluid and a cylindrical valve member (3) rotatably held in the valve body (2) and formed with a main passage (31) for flowing the main fluid. The cylindrical valve member (3) is rotated to switch the connection of the main passage (31) between the chamber communication passage (24) and the vent communication passage (25). The rotary switching valve (1) further includes a purge gas passage for passing purge gas in a clearance (11) between the valve body (2) and the cylindrical valve member (3), the purge gas being supplied to the clearance (11) to prevent the main fluid from leaking out of the main passage (31).
Public/Granted literature
- US20100229984A1 ROTARY SWITCHING VALVE Public/Granted day:2010-09-16
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