发明授权
- 专利标题: Apparatus and method for investigating a sample
- 专利标题(中): 用于调查样品的装置和方法
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申请号: US12835409申请日: 2010-07-13
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公开(公告)号: US08373126B2公开(公告)日: 2013-02-12
- 发明人: Julian A. Cluff
- 申请人: Julian A. Cluff
- 申请人地址: GB Cambridge
- 专利权人: TeraView Limited
- 当前专利权人: TeraView Limited
- 当前专利权人地址: GB Cambridge
- 代理机构: Dickstein Shapiro LLP
- 优先权: GB0411271.0 20040520
- 主分类号: G01N21/35
- IPC分类号: G01N21/35 ; G01J1/42
摘要:
An apparatus for investigating a sample comprising: a source of beam radiation; a detector for detecting a beam of radiation reflected by the sample and an optical subsystem for manipulating the beam between source and detector wherein the optical subsystem comprises a first optical element arranged in use to angularly deflect the source beam within a given solid angle and a second optical element arranged to focus the beam from the first optical element onto a substantially flat image plane and wherein radiation reflected by the sample passes back through the first and second optical elements to the detector.
公开/授权文献
- US20110163234A1 APPARATUS AND METHOD FOR INVESTIGATING A SAMPLE 公开/授权日:2011-07-07