发明授权
US08375749B2 Method for fabricating porous silica preform 有权
多孔二氧化硅预制件的制造方法

Method for fabricating porous silica preform
摘要:
A method for fabricating a porous silica preform includes the steps of supplying fuel gas for generating an oxyhydrogen flame to a glass synthesizing burner; supplying Gas A containing silicon and Gas B containing fluorine to the burner; synthesizing glass particles; and depositing the glass particles around a starting rod, in which when glass particles are deposited directly on the starting rod, a supply of Gas A and a supply of Gas B supplied to the burner are adjusted so that a ratio of the number of fluorine atoms to the number of silicon atoms in the gas supplied to the burner satisfies the following Formula (1): {(number of F atoms)/(number of Si atoms)}≦0.1  (1).
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