发明授权
US08375787B2 Rotation rate sensor and method for operating a rotation rate sensor
有权
旋转速率传感器和操作旋转速度传感器的方法
- 专利标题: Rotation rate sensor and method for operating a rotation rate sensor
- 专利标题(中): 旋转速率传感器和操作旋转速度传感器的方法
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申请号: US12637171申请日: 2009-12-14
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公开(公告)号: US08375787B2公开(公告)日: 2013-02-19
- 发明人: Robert Sattler , Daniel Christoph Meisel , Joerg Hauer
- 申请人: Robert Sattler , Daniel Christoph Meisel , Joerg Hauer
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102008054749 20081216
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.
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