发明授权
US08375787B2 Rotation rate sensor and method for operating a rotation rate sensor 有权
旋转速率传感器和操作旋转速度传感器的方法

Rotation rate sensor and method for operating a rotation rate sensor
摘要:
A rotation rate sensor includes a substrate having a main extension plane, and a Coriolis element movable relative to the substrate, the Coriolis element being provided to be excitable to perform an oscillation deflection substantially parallel to the main extension plane; and the Coriolis element further being provided to be deflectable, by way of a Coriolis force acting on the Coriolis element, to perform a detectable Coriolis deflection perpendicular to the main extension plane; and the rotation rate sensor further including at least one compensation electrode that is provided for at least partial compensation, as a function of the oscillation deflection, for a levitation force acting on the Coriolis element.
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