Invention Grant
- Patent Title: Twin beam charged particle column and method of operating thereof
- Patent Title (中): 双束带电粒子柱及其操作方法
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Application No.: US13045068Application Date: 2011-03-10
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Publication No.: US08378299B2Publication Date: 2013-02-19
- Inventor: Jürgen Frosien
- Applicant: Jürgen Frosien
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik MBH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik MBH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP10156115 20100310
- Main IPC: G01B15/00
- IPC: G01B15/00
Abstract:
A column for a charged particle beam device is described. The column includes a charged particle emitter for emitting a primary charged particle beam as one source of the primary charged particle beam; a biprism adapted for acting on the primary charged particle beam so that two virtual sources are generated; and a charged particle beam optics adapted to focus the charged particle beam simultaneously on two positions of a specimen corresponding to images of the two virtual sources.
Public/Granted literature
- US20110220795A1 TWIN BEAM CHARGED PARTICLE COLUMN AND METHOD OF OPERATING THEREOF Public/Granted day:2011-09-15
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