发明授权
US08378561B2 Electron emitter and field emission device provided with electron emitter
有权
具有电子发射体的电子发射体和场发射装置
- 专利标题: Electron emitter and field emission device provided with electron emitter
- 专利标题(中): 具有电子发射体的电子发射体和场发射装置
-
申请号: US13055560申请日: 2009-07-30
-
公开(公告)号: US08378561B2公开(公告)日: 2013-02-19
- 发明人: Yoshihisa Ishiguro , Masanori Haba , Ryouichi Suzuki
- 申请人: Yoshihisa Ishiguro , Masanori Haba , Ryouichi Suzuki
- 申请人地址: JP Tokyo
- 专利权人: Life Technology Research Institute, Inc.
- 当前专利权人: Life Technology Research Institute, Inc.
- 当前专利权人地址: JP Tokyo
- 代理机构: Foley & Lardner LLP
- 优先权: JP2008-198809 20080731; JP2009-003713 20090109
- 国际申请: PCT/JP2009/063563 WO 20090730
- 国际公布: WO2010/013772 WO 20100204
- 主分类号: H01J63/04
- IPC分类号: H01J63/04
摘要:
An electron emitter includes a guard electrode 13 on the outer circumferential side of a carbon film structure 10 which is formed on a substrate 7 by plasma CVD method. This guard electrode 13 includes a curved surface portion (a curved surface portion that curves from top toward a side opposite to the film-forming direction) 13a convex in a film-forming direction of the carbon film structure 10. A curvature radius R1 of an outer-circumferential-side portion of the curved surface portion 13a is larger than or equal to a curvature radius R2 of a carbon-film-structure-side portion of the curved surface portion 13a.
公开/授权文献
信息查询