Invention Grant
- Patent Title: System and method for automatic laser beam alignment
- Patent Title (中): 自动激光束对准的系统和方法
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Application No.: US12192915Application Date: 2008-08-15
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Publication No.: US08379204B1Publication Date: 2013-02-19
- Inventor: James J. Cordingley , Michael Plotkin , John Keefe
- Applicant: James J. Cordingley , Michael Plotkin , John Keefe
- Applicant Address: US MA Bedford
- Assignee: GSI Group Corporation
- Current Assignee: GSI Group Corporation
- Current Assignee Address: US MA Bedford
- Agency: Knobbe, Martens, Olson and Bear LLP
- Main IPC: G01B11/00
- IPC: G01B11/00

Abstract:
A method makes a discrete adjustment to static alignment of a laser beam in a machine for selectively irradiating conductive links on or within a semiconductor substrate using the laser beam. The laser beam propagates along a beam path having an axis extending from a laser to a laser beam spot at a location on or within the semiconductor substrate. The method generates, based on at least one measured characteristic of the laser beam, at least one signal to control an adjustable optical element of the machine affecting the laser beam path. The method also sends said at least one signal to the adjustable optical element. The method then adjusts the adjustable optical element in response to said at least one signal so as to improve static alignment of the laser beam path axis.
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