发明授权
- 专利标题: Gas discharge laser line narrowing module
- 专利标题(中): 气体放电激光线变窄模块
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申请号: US11173955申请日: 2005-06-30
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公开(公告)号: US08379687B2公开(公告)日: 2013-02-19
- 发明人: Raymond F. Cybulski , Robert A. Bergstedt , William N. Partlo , Richard L. Sandstrom , Gon Wang
- 申请人: Raymond F. Cybulski , Robert A. Bergstedt , William N. Partlo , Richard L. Sandstrom , Gon Wang
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 代理机构: Cymer, Inc.
- 主分类号: H01S3/08
- IPC分类号: H01S3/08
摘要:
A line narrowed gas discharge laser system and method of operating same is disclosed which may comprise a dispersive center wavelength selective element; a beam expander comprising a plurality of refractive elements; a refractive element positioning mechanism positioning at least one of the refractive elements to modify an angle of incidence of a laser light beam on the dispersive center wavelength selection element; each of the dispersive center wavelength selection element and the beam expander being aligned with each other and with a housing containing at least the dispersive center wavelength selection element; a housing positioning mechanism positioning the housing with respect to an optical axis of the gas discharge laser system. The dispersive element may comprise a grating and the beam expander may comprise a plurality of prisms. The housing may contain the dispersive center wavelength selective element and the beam expander. The housing positioning element may comprise a position locking mechanism.
公开/授权文献
- US20070002919A1 Gas discharge laser line narrowing module 公开/授权日:2007-01-04