Invention Grant
US08383958B2 Method to build robust mechanical structures on substrate surfaces
失效
在衬底表面上构建坚固的机械结构的方法
- Patent Title: Method to build robust mechanical structures on substrate surfaces
- Patent Title (中): 在衬底表面上构建坚固的机械结构的方法
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Application No.: US12783967Application Date: 2010-05-20
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Publication No.: US08383958B2Publication Date: 2013-02-26
- Inventor: Gary W. Grube , Gaetan L. Mathieu , Benjamin N. Eldridge , Chadwick D. Sofield
- Applicant: Gary W. Grube , Gaetan L. Mathieu , Benjamin N. Eldridge , Chadwick D. Sofield
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agent Kirton McConkie
- Main IPC: H01R12/04
- IPC: H01R12/04 ; H05K1/11 ; H05K1/16
Abstract:
A robust mechanical structure is provided to prevent small foundation structures formed on a substrate from detaching from the substrate surface. The strengthened structure is formed by plating a foundation metal layer on a seed layer and then embedding the plated foundation structure in an adhesive polymer material, such as epoxy. Components, such as spring probes, can then be constructed on the plated foundation. The adhesive polymer material better assures the adhesion of the metal foundation structure to the substrate surface by counteracting forces applied to an element, such as a spring probe, attached to the plated foundation.
Public/Granted literature
- US20100224303A1 METHOD TO BUILD ROBUST MECHANICAL STRUCTURES ON SUBSTRATE SURFACES Public/Granted day:2010-09-09
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