发明授权
US08385099B2 Semiconductor memory cell and manufacturing method thereof, and semiconductor memory devices 失效
半导体存储单元及其制造方法以及半导体存储器件

Semiconductor memory cell and manufacturing method thereof, and semiconductor memory devices
摘要:
A semiconductor memory cell includes: a memory element formed by a first field effect transistor having a gate insulating film made of a ferroelectric film; and a select switching element formed by a second field effect transistor having a gate insulating film made of a paraelectric film. The ferroelectric film and the paraelectric film are stacked together with a semiconductor film of a compound semiconductor interposed therebetween. A first gate electrode of the first field effect transistor is formed on a side of the ferroelectric film, and a second gate electrode of the second field effect transistor is formed on a side of the paraelectric film so as to face the first gate electrode. The semiconductor film forms a common channel layer of the first and second field effect transistors.
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