发明授权
- 专利标题: Semiconductor memory cell and manufacturing method thereof, and semiconductor memory devices
- 专利标题(中): 半导体存储单元及其制造方法以及半导体存储器件
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申请号: US13211983申请日: 2011-08-17
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公开(公告)号: US08385099B2公开(公告)日: 2013-02-26
- 发明人: Yukihiro Kaneko , Yoshihisa Kato , Hiroyuki Tanaka
- 申请人: Yukihiro Kaneko , Yoshihisa Kato , Hiroyuki Tanaka
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2009-040878 20090224; JP2009-054919 20090309; JP2009-119619 20090518
- 主分类号: G11C11/22
- IPC分类号: G11C11/22
摘要:
A semiconductor memory cell includes: a memory element formed by a first field effect transistor having a gate insulating film made of a ferroelectric film; and a select switching element formed by a second field effect transistor having a gate insulating film made of a paraelectric film. The ferroelectric film and the paraelectric film are stacked together with a semiconductor film of a compound semiconductor interposed therebetween. A first gate electrode of the first field effect transistor is formed on a side of the ferroelectric film, and a second gate electrode of the second field effect transistor is formed on a side of the paraelectric film so as to face the first gate electrode. The semiconductor film forms a common channel layer of the first and second field effect transistors.
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