- 专利标题: Combinatorial process optimization methodology and system
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申请号: US13274621申请日: 2011-10-17
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公开(公告)号: US08386210B2公开(公告)日: 2013-02-26
- 发明人: Prashant B. Phatak
- 申请人: Prashant B. Phatak
- 申请人地址: US CA San Jose
- 专利权人: Intermolecular, Inc.
- 当前专利权人: Intermolecular, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A method for obtaining an optimized process solution from a set of design of experiments in a cost effective manner is provided. An actual experiment is performed and data from the experiments is obtained. Through statistical analysis of the data, coefficients are obtained. These coefficients are input into an experiment simulator where input parameters and conditions are combined with the coefficients to predict an output for the input parameters and conditions. From simulated results, conclusions can be drawn as to sets of input parameters and conditions providing desired results. Thereafter, physical experiments utilizing the input parameters and conditions may be performed to verify the simulated results.
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