发明授权
- 专利标题： Method for making transmission electron microscope micro-grid
- 专利标题（中）： 制造透射电子显微镜微格栅的方法
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申请号： US12944176申请日： 2010-11-11
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公开(公告)号： US08387227B2公开(公告)日： 2013-03-05
- 发明人: Liang Liu , Li Fan , Chen Feng , Li Qian , Yu-Quan Wang
- 申请人： Liang Liu , Li Fan , Chen Feng , Li Qian , Yu-Quan Wang
- 申请人地址： CN Beijing
- 专利权人： Beijing FUNATE Innovation Technology Co., Ltd.
- 当前专利权人： Beijing FUNATE Innovation Technology Co., Ltd.
- 当前专利权人地址： CN Beijing
- 代理机构： Altis Law Group, Inc.
- 优先权： CN201010146836 20100414
- 主分类号： B21D39/00
- IPC分类号： B21D39/00
摘要：
A method for making a TEM micro-grid is provided. The method includes the following steps. A carrier, a carbon nanotube structure, and a protector are provided. The carrier defines a first through opening. The protector defines a second through opening. The protector, the carbon nanotube structure and the carrier are stacked such that the carbon nanotube structure is located between the carrier and the protector. The second through opening at least partly overlaps with the first through opening.
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