Invention Grant
- Patent Title: Thin film transistor and manufacturing method of the same
- Patent Title (中): 薄膜晶体管及其制造方法相同
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Application No.: US12954794Application Date: 2010-11-26
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Publication No.: US08389345B2Publication Date: 2013-03-05
- Inventor: Hiroshi Tanabe
- Applicant: Hiroshi Tanabe
- Applicant Address: JP Kanagawa
- Assignee: NEC LCD Technologies, Ltd.
- Current Assignee: NEC LCD Technologies, Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Young & Thompson
- Priority: JP2007-179822 20070709
- Main IPC: H01L21/205
- IPC: H01L21/205

Abstract:
To achieve TFT having a high light-resistance characteristic with a suppressed light leak current at low cost by simplifying the manufacturing processes. The TFT basically includes: a light-shielding film formed on a glass substrate that serves as an insulating substrate; an insulating film formed on the light-shielding film; a semiconductor film formed on the insulating film; and a gate insulating film formed on the semiconductor film. Each layer of a laminate that is configured with three layers of the light-shielding film, the insulating film, and the semiconductor film is patterned simultaneously. Further, each layer of the laminate is configured with silicon or a material containing silicon.
Public/Granted literature
- US20110068343A1 THIN FILM TRANSISTOR AND MANUFACTURING METHOD OF THE SAME Public/Granted day:2011-03-24
Information query
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