Invention Grant
US08389345B2 Thin film transistor and manufacturing method of the same 有权
薄膜晶体管及其制造方法相同

Thin film transistor and manufacturing method of the same
Abstract:
To achieve TFT having a high light-resistance characteristic with a suppressed light leak current at low cost by simplifying the manufacturing processes. The TFT basically includes: a light-shielding film formed on a glass substrate that serves as an insulating substrate; an insulating film formed on the light-shielding film; a semiconductor film formed on the insulating film; and a gate insulating film formed on the semiconductor film. Each layer of a laminate that is configured with three layers of the light-shielding film, the insulating film, and the semiconductor film is patterned simultaneously. Further, each layer of the laminate is configured with silicon or a material containing silicon.
Public/Granted literature
Information query
Patent Agency Ranking
0/0