发明授权
- 专利标题： Method of manufacturing heat-assisted magnetic recording head with internal mirror
- 专利标题（中）： 制造带内镜的热辅助磁记录头的方法
-
申请号： US13538996申请日： 2012-06-29
-
公开(公告)号： US08391109B2公开(公告)日： 2013-03-05
- 发明人: Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
- 申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Kazuo Ishizaki , Takehiro Horinaka
- 申请人地址： US CA Milpitas
- 专利权人： Headway Technologies, Inc.
- 当前专利权人： Headway Technologies, Inc.
- 当前专利权人地址： US CA Milpitas
- 代理机构： Oliff & Berridge, PLC
- 主分类号： G11B11/00
- IPC分类号： G11B11/00
摘要：
A manufacturing method for a heat-assisted magnetic recording head includes the step of forming an internal mirror that includes a reflecting film support body and a reflecting film. The reflecting film support body includes first and second inclined surfaces. The reflecting film includes first and second portions that are located on the first and second inclined surfaces, respectively. The step of forming the internal mirror includes the step of forming the reflecting film support body and the step of forming the reflecting film. The step of forming the reflecting film support body forms an initial support body, and performs two taper-etching processes on the initial support body so that the initial support body is provided with the first and second inclined surfaces.
公开/授权文献
信息查询
IPC分类:
