发明授权
- 专利标题: Molding windows in thin pads
- 专利标题(中): 模制窗户在薄垫
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申请号: US12762175申请日: 2010-04-16
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公开(公告)号: US08393940B2公开(公告)日: 2013-03-12
- 发明人: Boguslaw A Swedek , Doyle E Bennett , Dominic J Benvegnu
- 申请人: Boguslaw A Swedek , Doyle E Bennett , Dominic J Benvegnu
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Fish & Richardson P.C.
- 主分类号: B24D11/00
- IPC分类号: B24D11/00
摘要:
A polishing pad includes a polishing layer having a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The solid light-transmitting window has an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension. A top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer.
公开/授权文献
- US20110256818A1 Molding Windows in Thin Pads 公开/授权日:2011-10-20
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