发明授权
- 专利标题： Spin head and method of chucking substrate using the same
- 专利标题（中）： 旋转头和使用其夹持底物的方法
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申请号： US12591247申请日： 2009-11-13
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公开(公告)号： US08394234B2公开(公告)日： 2013-03-12
- 发明人: Taek Youb Lee
- 申请人： Taek Youb Lee
- 申请人地址： KR Chungcheongnam-Do
- 专利权人： Semes Co., Ltd.
- 当前专利权人： Semes Co., Ltd.
- 当前专利权人地址： KR Chungcheongnam-Do
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： KR10-2008-0118072 20081126
- 主分类号： H01L21/465
- IPC分类号： H01L21/465
摘要：
Provided is a spin head. Chuck pins, installed at a support plate to support the lateral surface of a substrate, are moved along the perpendicular direction to the radial direction of the support plate. The effect of centrifugal force applied to the chuck pins during the rotation of the support plate is minimized to support a substrate stably.
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