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US08398865B2 Method of manufacturing a micromechanical part 有权
微机械部件的制造方法

Method of manufacturing a micromechanical part
Abstract:
A method of manufacturing a mechanical part includes the steps of providing a micro-machinable substrate; etching a pattern which includes the part through the entire substrate using photolithography; mounting the etched substrate on a support so as to leave the top and bottom surfaces of said substrate accessible for coating; depositing a tribological quality improving coating of on the outer surface of the part; and releasing the part from the substrate.
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