- 专利标题: Polycrystalline silicon and method for the production thereof
- 专利标题(中): 多晶硅及其制造方法
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申请号: US12680322申请日: 2008-09-22
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公开(公告)号: US08398946B2公开(公告)日: 2013-03-19
- 发明人: Harald Hertlein , Oliver Kraetzschmar
- 申请人: Harald Hertlein , Oliver Kraetzschmar
- 申请人地址: DE Munich
- 专利权人: Wacker Chemie AG
- 当前专利权人: Wacker Chemie AG
- 当前专利权人地址: DE Munich
- 代理机构: Brooks Kushman P.C.
- 优先权: DE102007047210 20071002
- 国际申请: PCT/EP2008/062610 WO 20080922
- 国际公布: WO2009/047107 WO 20090416
- 主分类号: C01B33/00
- IPC分类号: C01B33/00
摘要:
Brittle polysilicon rods having a rod cross-section of 80-99% available for electrical conduction and a flexural strength of 0.1 to 80 N/mm2 are produced by a process wherein the temperature of the bridge of polysilicon rods in the Siemens process is held at a high temperature and the flow rate of chlorosilanes is increased to the maximum within a short time. The rods are easily fragmented with low force, resulting in polysilicon with a low level of metallic impurities.
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