发明授权
- 专利标题: Oscillator device, optical deflecting device and method of controlling the same
- 专利标题(中): 振荡器装置,光学偏转装置及其控制方法
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申请号: US12160209申请日: 2007-02-13
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公开(公告)号: US08400698B2公开(公告)日: 2013-03-19
- 发明人: Kazunari Fujii , Yukio Furukawa , Takahiro Akiyama , Ryuhei Shoji , Soichiro Suzuki , Shimpei Matsuo , Tatsuya Hotogi , Shinichiro Iimura
- 申请人: Kazunari Fujii , Yukio Furukawa , Takahiro Akiyama , Ryuhei Shoji , Soichiro Suzuki , Shimpei Matsuo , Tatsuya Hotogi , Shinichiro Iimura
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2006-035491 20060213; JP2006-189947 20060711; JP2007-023881 20070202
- 国际申请: PCT/JP2007/052909 WO 20070213
- 国际公布: WO2007/094489 WO 20070823
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
Disclosed is an oscillator device that includes an oscillating system having a first oscillator, a second oscillator, a first torsion spring for connecting the first and second oscillators each other, and a second torsion spring being connected to the second oscillator and having a common torsional axis with the first torsion spring; a supporting system for supporting the oscillating system; a driving system for driving the oscillating system so that at least one of the first and second oscillators produces oscillation as can be expressed by an equation that contains a sum of a plurality of time functions; a signal producing system for producing an output signal corresponding to displacement of at least one of the first and second oscillators; and a drive control system for controlling the driving system on the basis of the output signal of the signal producing system so that at least one of amplitude and phase of the time function takes a predetermined value.
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