发明授权
US08400698B2 Oscillator device, optical deflecting device and method of controlling the same 有权
振荡器装置,光学偏转装置及其控制方法

Oscillator device, optical deflecting device and method of controlling the same
摘要:
Disclosed is an oscillator device that includes an oscillating system having a first oscillator, a second oscillator, a first torsion spring for connecting the first and second oscillators each other, and a second torsion spring being connected to the second oscillator and having a common torsional axis with the first torsion spring; a supporting system for supporting the oscillating system; a driving system for driving the oscillating system so that at least one of the first and second oscillators produces oscillation as can be expressed by an equation that contains a sum of a plurality of time functions; a signal producing system for producing an output signal corresponding to displacement of at least one of the first and second oscillators; and a drive control system for controlling the driving system on the basis of the output signal of the signal producing system so that at least one of amplitude and phase of the time function takes a predetermined value.
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