发明授权
- 专利标题: Polishing composition for hard disk substrate
- 专利标题(中): 硬盘基材抛光组合物
-
申请号: US12259904申请日: 2008-10-28
-
公开(公告)号: US08404009B2公开(公告)日: 2013-03-26
- 发明人: Masahiko Suzuki , Kenichi Suenaga , Makoto Suzuki
- 申请人: Masahiko Suzuki , Kenichi Suenaga , Makoto Suzuki
- 申请人地址: JP Tokyo
- 专利权人: Kao Corporation
- 当前专利权人: Kao Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2007-280862 20071029; JP2007-337482 20071227; JP2007-341301 20071228; JP2008-143257 20080530
- 主分类号: B24D3/02
- IPC分类号: B24D3/02 ; C09C1/68 ; C09K3/14
摘要:
A polishing composition for a hard disk substrate includes alumina particles, silica particles, and water. The volume median diameter of secondary particles of the alumina particles measured by a laser beam diffraction method is 0.1 to 0.8 μm. The volume median diameter of primary particles of the silica particles measured by transmission electron microscope observation is 40 to 150 nm. The standard deviation in number-basis particle size of the primary particles of the silica particles measured by the transmission electron microscope observation is 11 to 35 nm. The polishing composition for a hard disk substrate can preferably reduce the embedding of alumina abrasive grains into the substrate without impairing the productivity.
公开/授权文献
- US20090111359A1 POLISHING COMPOSITION FOR HARD DISK SUBSTRATE 公开/授权日:2009-04-30
信息查询