发明授权
- 专利标题： Process control for a sonication cleaning tank
- 专利标题（中）： 超声波清洗槽的过程控制
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申请号： US12473223申请日： 2009-05-27
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公开(公告)号： US08404056B1公开(公告)日： 2013-03-26
- 发明人: Chaoyuan Chen , Bing-Shiuan Chang , Rhownica A. Lund , Atul K. Trivedi , John Cho , Shaun H. Chen
- 申请人： Chaoyuan Chen , Bing-Shiuan Chang , Rhownica A. Lund , Atul K. Trivedi , John Cho , Shaun H. Chen
- 申请人地址： US CA San Jose
- 专利权人： WD Media, LLC
- 当前专利权人： WD Media, LLC
- 当前专利权人地址： US CA San Jose
- 主分类号： B08B3/00
- IPC分类号： B08B3/00
摘要：
A disk is placed into a sonication cleaning tank containing a liquid. A first flow rate and a first sonication power are applied to the liquid to clean the disk. An opacity count is generated indicative of contaminants and/or bubbles in the liquid. Based at least in part on the opacity count, a second flow rate and a second sonication power are then applied to the liquid.