发明授权
- 专利标题： LED substrate processing
- 专利标题（中）： LED基板加工
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申请号： US12761319申请日： 2010-04-15
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公开(公告)号： US08404499B2公开(公告)日： 2013-03-26
- 发明人: Stephen Moffatt
- 申请人： Stephen Moffatt
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Kilpatrick Townsend & Stockton LLP
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
Embodiments of the present invention pertain to substrate processing equipment and methods incorporating light emitting diodes (LEDs) for thermally processing substrates. Such light sources offer a variety of advantages including higher efficiency and more rapid response times. Pulse widths are selectable down to under a millisecond but can be for long pulses up to and exceeding a second. LEDs are preferable to tungsten-halogen lamps even in circumstances that allow longer processing times, since LEDs produce light with greater than 50% efficiency and tungsten-halogen lamps operate with less than 5% efficiency.
公开/授权文献
- US20100267174A1 LED Substrate Processing 公开/授权日：2010-10-21
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