发明授权
- 专利标题: Scanning electron microscope and method for detecting an image using the same
- 专利标题(中): 扫描电子显微镜及使用其的图像检测方法
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申请号: US12244188申请日: 2008-10-02
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公开(公告)号: US08405025B2公开(公告)日: 2013-03-26
- 发明人: Toshifumi Honda , Hiroshi Makino
- 申请人: Toshifumi Honda , Hiroshi Makino
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Antonelli, Terry, Stout & Kraus, LLP.
- 优先权: JP2005-005882 20050113
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
A scanning electron microscope includes an electron beam source which emits an electron beam, a beam current controller which controls a beam current of the electron beam, an electron beam converger which converges the electron beam on a surface of a sample, an electron beam scanner which scans the electron beam on the surface of the sample, a table which mounts the sample and moves at least in one direction, a detector which detects a secondary electron or a reflected electron emanated from the sample by the scan of the electron beam, an image former which forms an image of the sample based on a detection value of the detector, an image processor which processes the image formed by the image former. The beam current controller controls the beam current of the electron beam by changing transmittance of the electron beam in an irradiation path of the electron beam.
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