发明授权
- 专利标题： Vapor based combinatorial processing
- 专利标题（中）： 气相组合处理
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申请号： US13332813申请日： 2011-12-21
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公开(公告)号： US08409354B2公开(公告)日： 2013-04-02
- 发明人: Tony P. Chiang , Chi-l Lang , Sunil Shanker
- 申请人： Tony P. Chiang , Chi-l Lang , Sunil Shanker
- 申请人地址： US CA San Jose
- 专利权人： Intermolecular, Inc.
- 当前专利权人： Intermolecular, Inc.
- 当前专利权人地址： US CA San Jose
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; C23C16/458
摘要：
A combinatorial processing chamber and method are provided. In the method a fluid volume flows over a surface of a substrate with differing portions of the fluid volume having different constituent components to concurrently expose segregated regions of the substrate to a mixture of the constituent components that differ from constituent components to which adjacent regions are exposed. Differently processed segregated regions are generated through the multiple flowings.
公开/授权文献
- US20120090545A1 VAPOR BASED COMBINATORIAL PROCESSING 公开/授权日：2012-04-19
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