发明授权
- 专利标题： Differential FET structures for electrical monitoring of overlay
- 专利标题（中）： 用于覆盖层电气监控的差分FET结构
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申请号： US12617901申请日： 2009-11-13
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公开(公告)号： US08409882B2公开(公告)日： 2013-04-02
- 发明人: Emrah Acar , Aditya Bansal , Amith Singhee
- 申请人： Emrah Acar , Aditya Bansal , Amith Singhee
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Tutunjian & Bitetto, P.C.
- 代理商 Preston Young
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
A method and apparatus for determining overlay includes an array of electronic devices having structures formed in a plurality of layers and such that a device on a first end of the array includes an offset from a position of a device on a second end of the array. A measurement device is configured to measure electrical characteristics of the devices in the array to determine a transition position between the electrical characteristics. A comparison device is configured to determine an overlay between the layers based on a device associated with the transition position.
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