发明授权
- 专利标题: Non-contact component inspection system
- 专利标题(中): 非接触元件检测系统
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申请号: US12798586申请日: 2010-04-07
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公开(公告)号: US08410466B2公开(公告)日: 2013-04-02
- 发明人: Stanley P. Johnson , Lawrence J. Zagorsky
- 申请人: Stanley P. Johnson , Lawrence J. Zagorsky
- 申请人地址: US WA Kent
- 专利权人: Quest Metrology Group, LLC
- 当前专利权人: Quest Metrology Group, LLC
- 当前专利权人地址: US WA Kent
- 代理机构: Christensen O'Connor Johnson Kindness PLLC
- 主分类号: G01N21/86
- IPC分类号: G01N21/86 ; G01B11/24
摘要:
A system and method for measuring the physical characteristics of a component where the system includes an electromagnetic radiation source defining a source optical path, the electromagnetic radiation source being operable to cause electromagnetic radiation to propagate along the source optical path, a sensing device defining a sensor optical path, a system support structure, a base structure, an electromagnetic radiation source mounting structure and a sensing device mounting structure, a positioning device including a positioning device stage, wherein the positioning device stage is movably disposed and a retention mount disposed on the positioning device stage, the retention mount being disposed within the sensor optical path such that when a component is retained within the retention mount, the component blocks at least a portion of the electromagnetic radiation to generate a silhouette, wherein the sensing device generates data responsive to the silhouette.
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