Invention Grant
US08411340B2 Ultra-wide angle MEMS scanner architecture 有权
超广角MEMS扫描仪架构

Ultra-wide angle MEMS scanner architecture
Abstract:
An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable mirror. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.
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