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发明授权
US08414974B2 Method of manufacturing silicon nanotubes using doughnut-shaped catalytic metal layer 有权
使用环形催化金属层制造硅纳米管的方法

Method of manufacturing silicon nanotubes using doughnut-shaped catalytic metal layer
摘要：
Provided is a method of manufacturing silicon nanotubes including forming non-catalytic metal islands on a substrate; forming catalyst metal doughnuts to surround the non-catalytic metal islands; and growing silicon nanotubes on the catalyst metal doughnuts. The silicon nanotubes are efficiently grown using the catalyst metal doughnuts.
摘要（中）：

提供一种制造硅纳米管的方法，包括在基板上形成非催化金属岛; 形成催化剂金属甜甜圈以包围非催化金属岛; 并在催化剂金属甜甜圈上生长硅纳米管。 使用催化剂金属甜甜圈有效地生长硅纳米管。

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