Invention Grant
US08415082B2 Resist composition, method of forming resist pattern, compound and method of producing the same, acid generator 有权
抗蚀剂组合物,抗蚀剂图案形成方法,化合物及其制造方法,酸发生剂

Resist composition, method of forming resist pattern, compound and method of producing the same, acid generator
Abstract:
A resist composition including a base material component (A) which exhibits changed solubility in an alkali developing solution under action of acid, and an acid generator component (B) which generates acid upon exposure, the acid generator component (B) including an acid generator (B1) consisting of a compound represented by general formula (b1-1) shown below: wherein RX represents a hydrocarbon group which may have a hetero atom; R1 represents a divalent linking group; Y1 represents an alkylene group of 1 to 4 carbon atoms or a fluorinated alkylene group of 1 to 4 carbon atoms; n represents an integer of 1 to 3; and Z represents an organic cation (exclusive of an amine ion and a quaternary ammonium ion) having a valence of n.
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