发明授权
- 专利标题: Acoustic sensor
- 专利标题(中): 声传感器
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申请号: US13012489申请日: 2011-01-24
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公开(公告)号: US08415717B2公开(公告)日: 2013-04-09
- 发明人: Jaewoo Lee , Chang Han Je , Woo Seok Yang , Jongdae Kim
- 申请人: Jaewoo Lee , Chang Han Je , Woo Seok Yang , Jongdae Kim
- 申请人地址: KR Daejeon
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2010-0103368 20101022
- 主分类号: H01L29/84
- IPC分类号: H01L29/84
摘要:
Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.
公开/授权文献
- US20120098076A1 ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME 公开/授权日:2012-04-26
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