发明授权
- 专利标题: Vibrating piece manufacturing method and vibrator manufacturing method
- 专利标题(中): 振动片制造方法和振动器制造方法
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申请号: US13460277申请日: 2012-04-30
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公开(公告)号: US08415863B2公开(公告)日: 2013-04-09
- 发明人: Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
- 申请人: Takashi Yamazaki , Tsukasa Funasaka , Takeo Funakawa , Makoto Furuhata
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2008-005768 20080115
- 主分类号: H03H9/19
- IPC分类号: H03H9/19 ; H03H9/21
摘要:
A vibrating piece manufacturing method includes: (a) preparing a supporting body having first and second surfaces, the first and second surfaces defining a thickness while being directed toward opposite directions, the supporting body including a base and a plurality of arms, the arms extending side-by-side in a direction orthogonal to a direction of the thickness from the base, a lower electrode film being disposed on the first surface of each of the arms, a piezoelectric film being disposed on the lower electrode films, at least one upper electrode film being disposed on the piezoelectric film, at least a part of the second surface of each of the arms being an exposed area; and (b) etching the exposed area of the second surface so as to reduce the thickness to reduce flexural rigidity of the arms with respect to the thickness direction.
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