发明授权
US08416822B2 Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus 有权
制造方法,表面发射激光器件,表面发射激光器阵列,光学扫描器和成像设备

Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
摘要:
A manufacturing method for manufacturing a surface-emitting laser device includes the steps of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on a substrate; etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof; selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide; forming a separating groove at a position away from the mesa structure; passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed; and coating a passivated part with a dielectric body.
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