发明授权
US08416822B2 Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
有权
制造方法,表面发射激光器件,表面发射激光器阵列,光学扫描器和成像设备
- 专利标题: Manufacturing method, surface-emitting laser device, surface-emitting laser array, optical scanner, and image forming apparatus
- 专利标题(中): 制造方法,表面发射激光器件,表面发射激光器阵列,光学扫描器和成像设备
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申请号: US13127531申请日: 2009-11-12
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公开(公告)号: US08416822B2公开(公告)日: 2013-04-09
- 发明人: Hiroyoshi Shouji , Shunichi Sato , Toshihiro Ishii , Kengo Makita , Masahiro Hayashi , Toshihide Sasaki , Akihiro Itoh
- 申请人: Hiroyoshi Shouji , Shunichi Sato , Toshihiro Ishii , Kengo Makita , Masahiro Hayashi , Toshihide Sasaki , Akihiro Itoh
- 申请人地址: JP Tokyo
- 专利权人: Ricoh Company, Ltd.
- 当前专利权人: Ricoh Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Cooper & Dunham LLP
- 优先权: JP2008296195 20081120; JP2009098657 20090415; JP2009230090 20091002
- 国际申请: PCT/JP2009/069596 WO 20091112
- 国际公布: WO2010/058805 WO 20100527
- 主分类号: H01S5/00
- IPC分类号: H01S5/00
摘要:
A manufacturing method for manufacturing a surface-emitting laser device includes the steps of forming a laminated body in which a lower reflecting mirror, a resonator structure including an active layer, and an upper reflecting layer having a selective oxidized layer are laminated on a substrate; etching the laminated body to form a mesa structure having the selective oxidized layer exposed at side surfaces thereof; selectively oxidizing the selective oxidized layer from the side surfaces of the mesa structure to form a constriction structure in which a current passing region is surrounded by an oxide; forming a separating groove at a position away from the mesa structure; passivating an outermost front surface of at least a part of the laminated body exposed when the separating groove is formed; and coating a passivated part with a dielectric body.
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