发明授权
US08420419B2 Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device
有权
III族氮化物半导体激光器件以及III族氮化物半导体激光器件的制造方法
- 专利标题: Group-III nitride semiconductor laser device, and method for fabricating group-III nitride semiconductor laser device
- 专利标题(中): III族氮化物半导体激光器件以及III族氮化物半导体激光器件的制造方法
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申请号: US13404310申请日: 2012-02-24
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公开(公告)号: US08420419B2公开(公告)日: 2013-04-16
- 发明人: Shimpei Takagi , Yusuke Yoshizumi , Koji Katayama , Masaki Ueno , Takatoshi Ikegami
- 申请人: Shimpei Takagi , Yusuke Yoshizumi , Koji Katayama , Masaki Ueno , Takatoshi Ikegami
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 代理机构: Venable LLP
- 代理商 Michael A. Sartori; Tamatane J. Aga
- 优先权: JPP2010-131404 20100608
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method of fabricating a III-nitride semiconductor laser device includes: preparing a substrate product, where the substrate product has a laser structure, the laser structure includes a semiconductor region and a substrate of a hexagonal III-nitride semiconductor, the substrate has a semipolar primary surface, and the semiconductor region is formed on the semipolar primary surface; scribing a first surface of the substrate product to form a scribed mark, the scribed mark extending in a direction of an a-axis of the hexagonal III-nitride semiconductor; and after forming the scribed mark, carrying out breakup of the substrate product by press against a second region of the substrate product while supporting a first region of the substrate product but not supporting the second region thereof, to form another substrate product and a laser bar.
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