Invention Grant
- Patent Title: Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
- Patent Title (中): 具有挠性铰链隔膜的冷凝器麦克风及其制造方法
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Application No.: US11875996Application Date: 2007-10-22
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Publication No.: US08422702B2Publication Date: 2013-04-16
- Inventor: Hye Jin Kim , Sung Q Lee , Kang Ho Park , Jong Dae Kim
- Applicant: Hye Jin Kim , Sung Q Lee , Kang Ho Park , Jong Dae Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2006-0122736 20061206; KR10-2007-0054259 20070604
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
A micromini condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and a method of manufacturing the same are provided.The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer to be used as a back plate on the first insulating layer; forming a plurality of sound holes by patterning the upper silicon layer; forming a second insulating layer on the upper silicon layer; forming a conductive layer on the upper silicon layer having the sound holes, and forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming a plurality of air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the sacrificial layer, the passivation layer, the conductive layer, the upper silicon layer, the first insulating layer and the lower silicon layer to form an air gap between the diaphragm and the upper silicon layer.Consequently, due to the flexible diaphragm, a manufacturing process using semiconductor MEMS technology may improve the sensitivity of the condenser microphone and reduce the size of the condenser microphone, thereby enabling integration into a portable terminal.
Public/Granted literature
- US20080137884A1 CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2008-06-12
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