发明授权
- 专利标题: Probe wafer, probe device, and testing system
- 专利标题(中): 探头晶圆,探针装置和测试系统
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申请号: US12857483申请日: 2010-08-16
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公开(公告)号: US08427187B2公开(公告)日: 2013-04-23
- 发明人: Yoshio Komoto , Yoshiharu Umemura
- 申请人: Yoshio Komoto , Yoshiharu Umemura
- 申请人地址: JP Tokyo
- 专利权人: Advantest Corporation
- 当前专利权人: Advantest Corporation
- 当前专利权人地址: JP Tokyo
- 主分类号: G01R31/00
- IPC分类号: G01R31/00
摘要:
There is provided a testing system for testing a plurality of semiconductor chips formed on a single semiconductor wafer. The testing system includes a wafer substrate, a plurality of wafer connector terminals that are provided on the wafer substrate in such a manner that one or more wafer connector terminals correspond to each of the semiconductor chips, where each wafer connector terminal is to be electrically connected to an input/output terminal of a corresponding semiconductor chip, a plurality of circuit units that are provided on the wafer substrate in such a manner that one or more circuit units corresponds to each of the semiconductor chips, where each circuit unit generates a test signal to be used for testing a corresponding semiconductor chip and supplies the test signal to the corresponding semiconductor chip to test the corresponding semiconductor chip, and a controller that generates a control signal used to control the plurality of circuit units.
公开/授权文献
- US20110121848A1 PROBE WAFER, PROBE DEVICE, AND TESTING SYSTEM 公开/授权日:2011-05-26
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