发明授权
- 专利标题: Optical displacement meter
- 专利标题(中): 光学位移计
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申请号: US12834144申请日: 2010-07-12
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公开(公告)号: US08427644B2公开(公告)日: 2013-04-23
- 发明人: Yutaka Miki
- 申请人: Yutaka Miki
- 申请人地址: JP Kanagawa
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kanagawa
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2009-168197 20090716; JP2009-289793 20091221
- 主分类号: G01J4/00
- IPC分类号: G01J4/00
摘要:
An optical displacement meter includes: a spatial filter configured to extract light under measurement of a wavelength focused on a measurement target and to specify the wavelength of the light under measurement; a polarizer configured to divide the light collimated and caused to propagate in one direction into linearly polarized beams in two directions orthogonal to a propagating direction; a wavelength plate that allows passage of the linearly polarized beams to produce elliptically polarized light having a phase difference commensurate with a light wavelength; a polarized light separator configured to divide the elliptically polarized light into polarized light components in the two directions; and a computing circuit configured to perform computation of (A−B)/(A+B) by use of light quantity signals A and B, which respectively correspond to the two polarized light components.
公开/授权文献
- US20110013186A1 OPTICAL DISPLACEMENT METER 公开/授权日:2011-01-20
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