Invention Grant
- Patent Title: Multiaxial micromechanical acceleration sensor
- Patent Title (中): 多轴微机械加速度传感器
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Application No.: US12308632Application Date: 2007-11-14
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Publication No.: US08429971B2Publication Date: 2013-04-30
- Inventor: Johannes Classen , Axel Franke , Dietrich Schubert , Kersten Kehr , Ralf Reichenbach
- Applicant: Johannes Classen , Axel Franke , Dietrich Schubert , Kersten Kehr , Ralf Reichenbach
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102006062314 20061227
- International Application: PCT/EP2007/062307 WO 20071114
- International Announcement: WO2008/080683 WO 20080710
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
A micromechanical acceleration sensor includes a substrate, an elastic diaphragm which extends parallel to the substrate plane and which is partially connected to the substrate, and which has a surface region which may be deflected perpendicular to the substrate plane, and a seismic mass whose center of gravity is situated outside the plane of the elastic diaphragm. The seismic mass extends at a distance over substrate regions which are situated outside the region of the elastic diaphragm and which include a system composed of multiple electrodes, each of which together with oppositely situated regions of the seismic mass forms a capacitor in a circuit. In its central region the seismic mass is attached to the elastic diaphragm in the surface region of the elastic diaphragm which may be deflected perpendicular to the substrate plane.
Public/Granted literature
- US20110174076A1 Multiaxial micromechanical acceleration sensor Public/Granted day:2011-07-21
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