发明授权
- 专利标题: Chemical-mechanical planarization pad
- 专利标题(中): 化学机械平面化垫
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申请号: US12347788申请日: 2008-12-31
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公开(公告)号: US08430721B2公开(公告)日: 2013-04-30
- 发明人: Oscar K. Hsu , Paul Lefevre , Marc C. Jin , John Erik Aldeborgh , David Adam Wells
- 申请人: Oscar K. Hsu , Paul Lefevre , Marc C. Jin , John Erik Aldeborgh , David Adam Wells
- 申请人地址: US MA Wilmington
- 专利权人: Innopad, Inc.
- 当前专利权人: Innopad, Inc.
- 当前专利权人地址: US MA Wilmington
- 代理机构: Grossman, Tucker, Perreault & Pfleger, PLLC
- 主分类号: B24D11/00
- IPC分类号: B24D11/00
摘要:
The present disclosure relates to a polishing pad. The polishing pad may include a polymer layer having a three-dimensional network therein and a composite layer having the ability to equalize pressure across the pad surface, including a first adhesive wherein the composite exhibits a hydrostatic modulus of 1 to 500 psi when compressed at a pressure of 1 to 50 psi.
公开/授权文献
- US20090170413A1 CHEMICAL-MECHANICAL PLANARIZATION PAD 公开/授权日:2009-07-02
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