发明授权
US08430721B2 Chemical-mechanical planarization pad 有权
化学机械平面化垫

Chemical-mechanical planarization pad
摘要:
The present disclosure relates to a polishing pad. The polishing pad may include a polymer layer having a three-dimensional network therein and a composite layer having the ability to equalize pressure across the pad surface, including a first adhesive wherein the composite exhibits a hydrostatic modulus of 1 to 500 psi when compressed at a pressure of 1 to 50 psi.
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