发明授权
- 专利标题： Damascene process using cleaning solution
- 专利标题（中）： 镶嵌工艺使用清洁溶液
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申请号： US13293282申请日： 2011-11-10
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公开(公告)号： US08431488B2公开(公告)日： 2013-04-30
- 发明人: An-Chi Liu , Tien-Cheng Lan
- 申请人： An-Chi Liu , Tien-Cheng Lan
- 申请人地址： TW Hsinchu
- 专利权人： United Microelectronics Corp.
- 当前专利权人： United Microelectronics Corp.
- 当前专利权人地址： TW Hsinchu
- 代理商 Ding Yu Tan
- 主分类号： H01L21/44
- IPC分类号： H01L21/44
摘要：
A cleaning solution is provided. The cleaning solution includes a fluorine containing compound, an inorganic acid, a chelating agent containing a carboxylic group and water for balance. The content of the fluorine containing compound is 0.01-0.5 wt % of. The content of the inorganic acid is 1-5 wt %.
公开/授权文献
- US20120052686A1 CLEANING SOLUTION AND DAMASCENE PROCESS USING THE SAME 公开/授权日：2012-03-01
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