Invention Grant
- Patent Title: Method and structure for balancing power and performance using fluorine and nitrogen doped substrates
- Patent Title (中): 使用氟和氮掺杂衬底平衡功率和性能的方法和结构
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Application No.: US12840689Application Date: 2010-07-21
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Publication No.: US08431955B2Publication Date: 2013-04-30
- Inventor: Brent A. Anderson , Terence B. Hook
- Applicant: Brent A. Anderson , Terence B. Hook
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb & Riley, LLC
- Agent David A. Cain, Esq.
- Main IPC: H01L33/00
- IPC: H01L33/00

Abstract:
Methods and systems evaluate an integrated circuit design for power consumption balance and performance balance, using a computerized device. Based on this process of evaluating the integrated circuit, the methods and systems can identify first sets of integrated circuit transistor structures within the integrated circuit design that need reduced power leakage and second sets of integrated circuit transistor structures that need higher performance to achieve the desired power consumption balance and performance balance. With this, the methods and systems alter the integrated circuit design to include implantation of a first dopant into a substrate before a gate insulator formation for the first sets of integrated circuit transistor structures; and alter the integrated circuit design to include implantation of a second dopant into the substrate before a gate insulator formation for the second sets of integrated circuit transistor structures. The method and system then output the altered integrated circuit design from the computerized device and/or manufactures the device according to the altered integrated circuit design.
Public/Granted literature
- US20120018812A1 METHOD AND STRUCTURE FOR BALANCING POWER AND PERFORMANCE USING FLUORINE AND NITROGEN DOPED SUBSTRATES Public/Granted day:2012-01-26
Information query
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