发明授权
US08435597B2 Diamond UV-sensor element and manufacturing method thereof, UV-sensor unit, and method of treating diamond single crystal
失效
金刚石紫外线传感器元件及其制造方法，UV传感器单元和处理金刚石单晶的方法
- 专利标题： Diamond UV-sensor element and manufacturing method thereof, UV-sensor unit, and method of treating diamond single crystal
- 专利标题（中）： 金刚石紫外线传感器元件及其制造方法，UV传感器单元和处理金刚石单晶的方法
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申请号： US12866554申请日： 2009-02-09
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公开(公告)号： US08435597B2公开(公告)日： 2013-05-07
- 发明人: Yasuo Koide , Meiyong Liao , Jose Alvarez , Jean-Paul Kleider
- 申请人： Yasuo Koide , Meiyong Liao , Jose Alvarez , Jean-Paul Kleider
- 申请人地址： JP Ibaraki FR Paris Cedex
- 专利权人： National Institute for Materials Science,Centre National de la Recherche Scientifique
- 当前专利权人： National Institute for Materials Science,Centre National de la Recherche Scientifique
- 当前专利权人地址： JP Ibaraki FR Paris Cedex
- 代理机构： Wenderoth, Lind & Ponack, L.L.P.
- 优先权： JP2008-027232 20080207
- 国际申请： PCT/JP2009/052172 WO 20090209
- 国际公布： WO2009/099233 WO 20090813
- 主分类号： B05D5/00
- IPC分类号： B05D5/00
摘要：
A method of manufacturing a diamond UV sensor element improved with a UV/visible light blind ratio using a diamond single crystal as a light receiving portion and detecting a light based on the change of electric resistance caused by a light irradiated to the light receiving portion is provided, the method, including (1) a step of hydrogenating the surface of the diamond single crystal in an atmosphere substantially containing hydrogen, and (2) a step of forming a light receiving portion by exposing the hydrogenated surface of the diamond single crystal into an atmosphere containing ozone or active oxygen.
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