发明授权
- 专利标题： Hybrid system having a non-MEMS device and a MEMS device
- 专利标题（中）： 具有非MEMS器件和MEMS器件的混合系统
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申请号： US12927949申请日： 2010-11-30
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公开(公告)号： US08436690B2公开(公告)日： 2013-05-07
- 发明人: Andrew D. McCraith , Richard S. Miller , Emmanuel P. Quevy
- 申请人： Andrew D. McCraith , Richard S. Miller , Emmanuel P. Quevy
- 申请人地址： US TX Austin
- 专利权人： Silicon Laboratories Inc.
- 当前专利权人： Silicon Laboratories Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： O'Keefe, Egan, Peterman & Enders LLP
- 主分类号： H03B5/30
- IPC分类号： H03B5/30
摘要：
A hybrid system having a non-MEMS device and a MEMS device is described. The apparatus includes a non-MEMS device and an integrated circuit including a MEMS device, the integrated circuit formed on a substrate. The integrated circuit includes a control circuit for the non-MEMS device and a MEMS control circuit for the MEMS device.
公开/授权文献
- US20110095835A1 Hybrid system having a non-mems device and a mems device 公开/授权日：2011-04-28
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